Board of Directors
Non-Management Members

William A. Angus, III
Chairman of the Board
Mr. Angus became Chairman of the Board in 2005 and has served as a consultant to the management of SemEquip. Mr. Angus retired in July 2002, as secretary of Cymer, Inc., the world’s leading supplier of excimer light sources used in semiconductor manufacturing, a post he held since July 1990. From February 1996 to December 2001, he served as Cymer’s senior vice president and chief financial officer. From July 1990 to February 1996, Mr. Angus served as vice president of finance and administration. In his duties for Cymer, Mr. Angus has established subsidiary operations and forged relationships and investments with and from major Japanese corporations. Previously, he was the chief financial officer and chief operating officer of Avant Garde Computing Inc., a manufacturer of data communications network management systems. He received a bachelor's degree in economics from the Wharton School of the University of Pennsylvania in 1968.

Melvin L. Katten
Secretary & Director
Mr. Katten is a founding partner of the national law firm of Katten Muchin Rosenman LLP, Chicago, Illinois, and a member of its board of directors. His practice has concentrated in federal tax matters, including corporate, international, criminal, estate and trust areas, as well as business counseling of all types. He currently serves as a board member of WSI Industries, Inc., and several non-public companies. He is also an active participant in numerous local charitable and civic activities.

Hilton Glavish, Ph.D.
Director
Dr. Glavish is widely recognized as a world authority in the design and manufacture of beam lines and radio frequency (RF) accelerators for ion implanters. He was the lead designer and inventor of the
RF accelerator used in the high-energy Axcelis implanter. This has been the highest performance and preferred high-energy implanter in the industry with over 300 machines in use worldwide. He is the designer and inventor of fast magnetic scanning (Mag-Scan) beam lines used in the Nissin Exceed and the Applied Materials’ SWIFT 200 and 300 mm serial ion implanters, and in the Ibis 200mm and 300mm high current batch oxygen implanters used for producing SIMOX wafers. His company, Zimec, Inc., continues to design implanter beam lines, and assumes overall responsibility for the design and manufacture of prototype beam lines, as well as the Nissin Exceed and Ibis SIMOX production beam lines.

Paul Low, Ph.D.
Director
Dr. Low is currently President and CEO of PRL Associates, a technology consulting firm. Prior to founding PRL Associates in 1992, Dr. Low was with IBM for 35 years. While at IBM he held numerous positions in technology management including President of Technology Products Division (with responsibilities for all semiconductor manufacturing and development worldwide), President of the General Products Division( with responsibility for disk and tape drive manufacturing and development worldwide), General Manager of the Technology Products Group (where he had responsibility for all semiconductor and packaging technology)  and a member of the Corporate Management Board.
Dr. Low is a member of the Board of Directors of Solectron, Veeco Instruments, and BlueShift Technologies and a retired member of the Board of Directors of Applied Materials. Dr. Low has served as a member of the Boards of Advisors of the Engineering School of Stanford University and the University of Vermont and a member of the Board of Trustees of RPI, Marist College and the University of Vermont. He has also served on the Boards of Directors of NCD, Xionics, VLSI and several private companies.

Eric O’Brien
Director
Mr. O’Brien is a General Partner at Lightspeed Venture Partners and focuses on investment opportunities in digital media, datacenter infrastructure, and semiconductors. Previously, he worked in product management at CIENA (formerly Lightera Networks), where he participated in the launch of the CoreDirector, the industry's leading intelligent optical switch. Prior to CIENA, Mr. O’Brien served as an associate at InterWest Partners where he focused on communications and software investments, and as an analyst at Morgan Stanley in the telecom mergers and acquisitions group. Mr. O’Brien has also worked as a marketing consultant for several startups, including Aperto Networks and PlaceWare (acquired by Microsoft). He holds an AB magna cum laude in Economics from Harvard and an MBA from the Stanford Graduate School of Business.

Christopher Schaepe
Director
Mr. Schaepe is a founding partner of Lightspeed Venture Partners, focusing primarily on investments in the areas of networking, storage and semiconductors. He has thirteen years of venture capital experience and four years of operating experience. Prior to joining Weiss, Peck & Greer Venture Partners in 1991, Mr. Schaepe worked at Goldman, Sachs & Co. in corporate finance and capital markets roles. He began his career as a software engineer at IBM. He holds BS and MS degrees in Computer Science and Electrical Engineering from MIT and an MBA from the Stanford Graduate School of Business.

Charles Sporck
Director
Mr. Sporck is the retired president and CEO of National Semiconductor Corporation. Mr. Sporck is also one of the founders of Sematech and its first chairman. Mr. Sporck is one of the co-founders of the Semiconductor Industry Association and was its first chairman. Mr. Sporck is largely credited as one of the visionaries who enabled Silicon Valley to become what it is today. He has served more than 30 years in the semiconductor manufacturing business at numerous levels.

Donald E. Weeden
Director
Mr. Weeden is a Managing Partner of Weeden & Co., a securities firm based in Greenwich, CT, the business of which is wholly with Institutional Investors. Mr. Weeden was an early investor in National Semiconductor Corp., Cymer Laser, and Cadence Design. Mr. Weeden served on the board of National for 38 years until retirement in 2000.