SemEquip has partnered with ATMI to be the exclusive material supplier of ClusterIon implant materials. ATMI is the leader in specialty materials and materials packaging products for the world's leading chipmakers and flat panel manufacturers. As the Source of Semiconductor Process Efficiency, ATMI helps customers improve wafer yields and lower operating costs.

ATMI's Ion Implant Resource Center is an ever-growing library of documents that describe, discuss, and support ATMI’s ion implant products for SDS^®, VAC^®, ClusterBoron^®, and developing technologies.

SemEquip and ATMI have established "The Cluster Implant Material Alliance" that combines the extensive process, equipment and materials expertise of both companies to help customers improve their implant productivity. Working with your tool vendor, the Cluster Implant Material Alliance is ready to deliver the future of ion implantation today.